ASML wins chipmakers’ High NA EUV commitments through 2030

  • ASML secured High NA EUV adoption commitments from TSMC, Samsung Electronics and SK Hynix.
  • TSMC targets 2030 volume production, while Samsung and SK Hynix target 2028.
  • Intel has processed more than one million wafers using High NA systems since 2023.

ASML has secured adoption commitments for its High NA EUV lithography systems from TSMC, Samsung Electronics and SK Hynix, reducing concerns that the roughly $400 million machines might fail to gain broad industry acceptance. TSMC plans to introduce High NA into volume production from 2030, while Samsung and SK Hynix target 2028; Micron has ordered the equipment without setting a production date. Intel, the earliest adopter, has processed more than one million wafers and used High NA to mass-produce some Core Ultra Series 3 Panther Lake processors on its 18A node. ASML says its existing EUV systems, priced at about $200 million each, are nearly sold out through 2027, while High NA systems are receiving successive volume commitments. The newer systems can print features about 40% smaller than current EUV tools and may reduce multi-patterning requirements. As of mid-July 2026, the global High NA fleet had exposed more than 1.35 million wafers, with the EXE:5200B reaching 135 wafers per hour and fleet availability at 84%. ASML expects availability to reach 90% by the fourth quarter of 2026 and targets 93% over the medium to long term. The company has order visibility through 2028, raised 2026 revenue guidance to €43 billion to €45 billion, and plans 30% capacity increases for Low-NA EUV and immersion DUV systems in both 2027 and 2028. AI-related demand continues to support investment despite a short-term chip-stock sell-off and debate over slowing AI development. Analysts and executives cited in the source say the industry’s long-term expansion remains intact, with major spending plans extending beyond 2028.

The information on this website is generated using AI and we cannot guarantee its accuracy. Please use it as reference information only.